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Author: J. Ito
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K. Amemiya, J. Ito, and K. Tokiguchi, “Aluminum Ion Implantation using a Variable Energy RFQ Implanter”, in
Proc. 6th European Particle Accelerator Conf. (EPAC'98)
, Stockholm, Sweden, Jun. 1998, paper WEP31C, pp. 2419-2421.
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