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[n]	R. Watanabe, T. Honda, X. Jin, Y. Tanimoto, and T. Uchiyama, “Sputtering characteristics of a compact NEG-coating device and performance evaluation of the TiZrV thin films”, in Proc. IPAC'25, Taipei, Taiwan, Jun. 2025, pp. 2517-2519. doi:10.18429/JACoW-IPAC2025-THPB008

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