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[n]	D. Shimizu, H. Ryuto, M. Takeuchi, and D. Yamamoto, “Liquid Cluster Ion Beam Processing of Transition Metal Films”, in Proc. 9th Int. Particle Accelerator Conf. (IPAC'18), Vancouver, Canada, Apr.-May 2018, pp. 415-417. doi:10.18429/JACoW-IPAC2018-MOPML011

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Paper Title: Liquid Cluster Ion Beam Processing of Transition Metal Films
Paper URL: http://accelconf.web.cern.ch/ipac2018/papers/MOPML011.pdf
Conference: 9th Int. Particle Accelerator Conf. (IPAC'18)
Paper ID: MOPML011
Location in proceedings: 415-417
Original Author String: D. Shimizu, H. Ryuto, M. Takeuchi, D. Yamamoto [Kyoto University, Photonics and Electronics Science and Engineering Center, Kyoto, Japan]

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