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[n]	I. Gonz?ílez D?¡az-Palacio et al., “PEALD SIS Studies for SRF Cavities”, in Proc. IPAC'22, Bangkok, Thailand, Jun. 2022, pp. 1222-1225. doi:10.18429/JACoW-IPAC2022-TUPOTK013

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Paper Title: PEALD SIS Studies for SRF Cavities
Paper URL: https://jacow.org/IPAC2022/papers/TUPOTK013.pdf
Conference: 13th Int. Particle Accelerator Conf. (IPAC'22)
Paper ID: TUPOTK013
Location in proceedings: 1222-1225
Original Author String: I. Gonz?ílez D?¡az-Palacio,R. H. Blick,W. Hillert,A. Jeromin,T. F. Keller,N. Krupka,A. Stierle,M. Wenskat,R. Zierold

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