[n] A. L. Zhang, B. J. Cui, Y. X. Jiang, T. H. Ma, S. X. Peng, and W. B. Wu, “TOWARD A HIGH-TEMPERATURE SURFACE MICROWAVE SOURCE FOR ION IMPLANTATION”, presented at the ECRIS'22, Ahmedabad, India, Oct. 2022, paper FRP2PG033, unpublished.
Use Complete Form
Paper Title: TOWARD A HIGH-TEMPERATURE SURFACE MICROWAVE SOURCE FOR ION IMPLANTATION
Conference: 25th International Workshop on ECR Ion Sources (ECRIS'22)
Paper ID: FRP2PG033
Original Author String: A.L. Zhang, B.J. Cui, Y.X. Jiang, T.H. Ma, S.X. Peng, W.B. Wu