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[n]	Q. Ji et al., “Micro-Electromechanical Systems Based Multi-Beam Ion Accelerators”, presented at the NAPAC'22, Albuquerque, NM, USA, Aug. 2022, paper WEZD5, unpublished. 

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Paper Title: Micro-Electromechanical Systems Based Multi-Beam Ion Accelerators
Conference: North American Particle Accelerator Conf. (NAPAC'22)
Paper ID: WEZD5
Original Author String: Q. Ji,K. Afridi,A. Amsellem,V. Gund,Y. Hou,A. Lal,S. M. Lund,D. Ni,A. Persaud,Z. Qin,T. Schenkel,P. A. Seidl,N. Valverde

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