[n] T. J. Campese et al., “Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography”, in Proc. IBIC'15, Melbourne, Australia, Sep. 2015, pp. 554-556. doi:10.18429/JACoW-IBIC2015-TUPB085
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Paper Title: Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography
Paper URL: https://jacow.org/IBIC2015/papers/TUPB085.pdf
Conference: 4th Int. Beam Instrumentation Conf. (IBIC'15)
Paper ID: TUPB085
Location in proceedings: 554-556
Original Author String: T.J. Campese, R.B. Agustsson, M.A. Harrison, B.T. Jacobson, A.Y. Murokh, A.G. Ovodenko, M. Ruelas, H.L. To [RadiaBeam, Santa Monica, California, USA] M.G. Fedurin, I. Pogorelsky, T.V. Shaftan [BNL, Upton, Long Island, New York, USA]