[n] A. V. Gurevich et al., “Developing RF Structures Using Atomic Layer Deposition”, in Proc. LINAC'10, Tsukuba, Japan, Sep. 2010, paper THP017, pp. 797-799.
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Paper Title: Developing RF Structures Using Atomic Layer Deposition
Paper URL: https://jacow.org/LINAC2010/papers/THP017.pdf
Conference: 25th Linear Accelerator Conf. (LINAC'10)
Paper ID: THP017
Location in proceedings: 797-799
Original Author String: A. V. Gurevich, G. Ciovati, J. Zasadzinski, Th. Proslier, M. J. Pellin, J. Norem, N. Becker, M. Kharitonov, J. Klug