[n] S. Veitzer and M. Dehnel, “Particle-in-cell modeling of low-temperature plasma ion sources for ion implantation”, presented at the IPAC'24, Nashville, TN, USA, May 2024, paper MOPR75, unpublished.
Use Complete Form
Paper Title: Particle-in-cell modeling of low-temperature plasma ion sources for ion implantation
Conference: 15th Int. Particle Accelerator Conf. (IPAC'24)
Paper ID: MOPR75
Original Author String: S. Veitzer, M. Dehnel