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[n]	S. Shin, J. Ko, J. H. Kim, and G. Ha, “Fabrication of THz corrugated structure using X-ray based lithography”, presented at the IPAC'24, Nashville, TN, USA, May 2024, paper MOPR12, this conference. 

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Paper Title: Fabrication of THz corrugated structure using X-ray based lithography
Conference: 15th Int. Particle Accelerator Conf. (IPAC'24)
Paper ID: MOPR12
Original Author String: S. Shin, J. Ko, J.H. Kim, H.-s. Kong, G. Ha, S.-h. Kim

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