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[n]	J. Rosenzweig, “Free-electron lasers for advanced semiconductor manufacturing needs”, presented at the LINAC'24, Chicago, IL, USA, Aug. 2024, paper FRYA002, unpublished. 

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Paper Title: Free-electron lasers for advanced semiconductor manufacturing needs
Conference: 32nd Linear Accelerator Conf. (LINAC'24)
Paper ID: FRYA002
Original Author String: J. Rosenzweig

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