[n] S. Simon, C. Benjamin, J. Bradley, and R. Valizadeh, “Impact of ion and neutral angular distribution on thin film deposition in HiPIMS and bipolar HiPIMS”, presented at the IPAC'25, Taipei, Taiwan, Jun. 2025, paper WEPB073, unpublished.
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Paper Title: Impact of ion and neutral angular distribution on thin film deposition in HiPIMS and bipolar HiPIMS
Conference: 16th Int. Particle Accelerator Conf. (IPAC'25)
Paper ID: WEPB073
Original Author String: S. Simon, C. Benjamin, J. Bradley, R. Valizadeh