JaCoW Logo

Reference Search

Reference


For Word

[n]	B. Rachmilowitz et al., “Large-area atomic layer deposition of titanium nitride for RF windows”, in Proc. IPAC'25, Taipei, Taiwan, Jun. 2025, pp. 2668-2669. doi:10.18429/JACoW-IPAC2025-THPB094

For LaTeX

For BibTeX

Use Complete Form

Metadata

Paper Title: Large-area atomic layer deposition of titanium nitride for RF windows
Conference: 16th Int. Particle Accelerator Conf. (IPAC'25)
Paper ID: THPB094
Location in proceedings: 2668-2669
Original Author String: B. Rachmilowitz, H. Bhandari, K. Hansen, R. Hayden, J. Moss, G. Toby, N. Veilleux

Associated Authors


Back to the list