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[n]	B. Rachmilowitz et al., “Large-area atomic layer deposition of titanium nitride for RF windows”, presented at the IPAC'25, Taipei, Taiwan, Jun. 2025, paper THPB094, unpublished. 

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Paper Title: Large-area atomic layer deposition of titanium nitride for RF windows
Conference: 16th Int. Particle Accelerator Conf. (IPAC'25)
Paper ID: THPB094
Original Author String: B. Rachmilowitz, H. Bhandari, K. Hansen, R. Hayden, J. Moss, G. Toby, N. Veilleux

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