[n] D. Nguyen, “Free-electron laser approaches to 6.x nm generation for Blue-X lithography”, presented at the NAPAC'25, Sacramento, California, USA, Aug. 2025, paper THP039, unpublished.
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Paper Title: Free-electron laser approaches to 6.x nm generation for Blue-X lithography
Conference: 6th North American Particle Accelerator Conference (NAPAC'25)
Paper ID: THP039
Original Author String: D. Nguyen