[n] D. Nguyen, “Free-Electron Lasers for Large-Scale EUV Lithography”, presented at the IPAC'26, Deauville, France, May 2026, paper TUP2328, this conference.
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Paper Title: Free-Electron Lasers for Large-Scale EUV Lithography
Conference: 17th Int. Particle Accelerator Conf. (IPAC'26)
Paper ID: TUP2328
Original Author String: D. Nguyen