[n] Y. Yuri et al., “Research and Development of an Ultrahigh Precision Single Ion Implanter”, in Proc. COOL'25, Stony Brook, NY, USA, Oct. 2025, pp. 8-12. doi:10.18429/JACoW-COOL2025-MOD2
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Paper Title: Research and Development of an Ultrahigh Precision Single Ion Implanter
Conference: 15th International Workshop on Beam Cooling and Related Topics (COOL'25)
Paper ID: MOD2
Location in proceedings: 8-12
Original Author String: Y. Yuri, K. Hosaka, N. Miyawaki, S. Hosoya, Y. Ishii, H. Kashiwagi, R. Yamagata, K. Narumi, S. Onoda, K. Muroo, K. Ito, H. Okamoto