[n] H. J. Yuan, X. W. Du, and Q. P. Wang, “An Argon-Oxygen or Argon-Hydrogen Radio-Frequency Plasma Cleaning Device for Removing Carbon Contamination from Optical Surfaces”, in Proc. MEDSI'23, Beijing, China, Nov. 2023, pp. 79-81. doi:10.18429/JACoW-MEDSI2023-TUPYP032
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Paper Title: An Argon-Oxygen or Argon-Hydrogen Radio-Frequency Plasma Cleaning Device for Removing Carbon Contamination from Optical Surfaces
Conference: MEDSI (MEDSI'23)
Paper ID: TUPYP032
Location in proceedings: 79-81
Original Author String: H. J. Yuan,X. W. Du,Q. P. Wang