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[n]	I. González Díaz-Palacio et al., “Interface studies of Nb-AlN-NbTiN multilayers grown by PEALD”, in Proc. SRF'25, Tokyo, Japan, Sep. 2025, paper THP37, pp. 686-691. 

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Paper Title: Interface studies of Nb-AlN-NbTiN multilayers grown by PEALD
Conference: 22st International Conference on RF Superconductivity (SRF'25)
Paper ID: THP37
Location in proceedings: 686-691
Original Author String: I. González Díaz-Palacio, L. Preece, G.K. Deyu, D. Turner, A. Moros, D. Reyes, M. García Blanco, H. Noei, A. Macpherson, A. Stierle, W. Hillert, M. Wenskat

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