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[n]	Y. Socol, G. N. Kulipanov, A. N. Matveenko, O. A. Shevchenko, and N. Vinokurov, “13.5-nm Free-Electron Laser for EUV Lithography”, in Proc. FEL'10, Malmö, Sweden, Aug. 2010, paper TUPA28, pp. 250-253.

For LaTeX

%\cite{Socol:FEL10-TUPA28} \bibitem{Socol:FEL10-TUPA28} Y. Socol, G. N. Kulipanov, A. N. Matveenko, O. A. Shevchenko, and N. Vinokurov, \textquotedblleft{13.5-nm Free-Electron Laser for EUV Lithography}\textquotedblright, in \emph{Proc. FEL’10}, Malmö, Sweden, Aug. 2010, paper TUPA28, pp. 250--253.

For BibTeX

@inproceedings{socol:fel10-tupa28, author = {Y. Socol and G. N. Kulipanov and A. N. Matveenko and O. A. Shevchenko and N. Vinokurov}, title = {{13.5-nm Free-Electron Laser for EUV Lithography}}, booktitle = {Proc. FEL'10}, pages = {250--253}, paper = {TUPA28}, venue = {Malmö, Sweden, Aug. 2010}, publisher = {JACoW Publishing, Geneva, Switzerland}, url = {https://jacow.org/FEL2010/papers/TUPA28.pdf}, language = {english} }

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Metadata

Paper Title: 13.5-nm Free-Electron Laser for EUV Lithography
Paper URL: https://jacow.org/FEL2010/papers/TUPA28.pdf
Conference: 32nd Int. Free Electron Laser Conf. (FEL'10)
Paper ID: TUPA28
Location in proceedings: 250-253
Original Author String: Y. Socol, Falcon Analytics, Netanya; G.N. Kulipanov, BINP SB RAS, Novosibirsk; A.N. Matveenko, HZB, Berlin; O.A. Shevchenko, N. Vinokurov, BINP SB RAS, Novosibirsk

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