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[n]	J. Norem et al., “Atomic Layer Deposition for SRF Cavities”, in Proc. PAC'09, Vancouver, Canada, May 2009, paper TU5PFP002, pp. 803-805. 

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Paper Title: Atomic Layer Deposition for SRF Cavities
Paper URL: https://jacow.org/PAC2009/papers/TU5PFP002.pdf
Conference: 23rd Particle Accelerator Conf. (PAC'09)
Paper ID: TU5PFP002
Location in proceedings: 803-805
Original Author String: J. Norem, ANL, Argonne; C.Z. Antoine, CEA, Gif-sur-Yvette; G. Ciovati, JLAB, Newport News, Virginia; L. Cooley, Fermilab, Batavia; J.W. Elam, ANL, Argonne; A.V. Gurevich, NHMFL, Tallahassee, Florida; Y. Ha, IIT, Chicago, Illinois; P. Kneisel, JLAB, Newport News, Virginia; M.J. Pellin, ANL, Argonne; Th. Proslier, IIT, Chicago, Illinois; C.E. Reece, R.A. Rimmer, JLAB, Newport News, Virginia; J. Zasadzinski, IIT, Chicago, Illinois

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