[n] J. Upadhyay, M. Nikolic, S. Popovic, L. Vuskovic, H. L. Phillips, and A-M. Valente-Feliciano, “Optimization of Ar/CL2 Plasma Parameters Used for SRF Cavity Etching”, in Proc. SRF'11, Chicago, IL, USA, Jul. 2011, paper TUPO043, pp. 479-481.
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Paper Title: Optimization of Ar/CL2 Plasma Parameters Used for SRF Cavity Etching
Paper URL: https://jacow.org/SRF2011/papers/TUPO043.pdf
Conference: 15th Int. Conf. RF Superconductivity (SRF'11)
Paper ID: TUPO043
Location in proceedings: 479-481
Original Author String: J. Upadhyay, M. Nikolic (Nikoli?), S. Popovic (Popovi?), L. Vuskovic (Vu?íkovi?) [ODU, Norfolk, Virginia, USA] H.L. Phillips, A-M. Valente-Feliciano [JLAB, Newport News, Virginia, USA]