JaCoW Logo

Reference Search

Reference


For Word

[n]	D. Shu et al., “Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution”, in Proc. MEDSI'16, Barcelona, Spain, Sep. 2016, pp. 124-127. doi:10.18429/JACoW-MEDSI2016-TUBA04

For LaTeX

For BibTeX

Use Complete Form

Metadata

Paper Title: Mechanical Design and Development of Compact Linear Nanopositioning Flexure Stages with Centimeter-Level Travel Range and Nanometer-Level Resolution
Paper URL: https://jacow.org/medsi2016/papers/TUBA04.pdf
Conference: 9th Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conf. (MEDSI'16)
Paper ID: TUBA04
Location in proceedings: 124-127
Original Author String: D. Shu, J.W.J. Anton, S.P. Kearney, B. Lai, W. Liu, J. Maser, C. Roehrig, J.Z. Tischler [ANL, Argonne, Illinois, USA] J.W.J. Anton [University of Illinois at Chicago, Chicago, USA]

Associated Authors


Back to the list