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[n]	M. Toyoda, R. Sunayama, and M. Yanagihara, “Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors”, in Proc. MEDSI'16, Barcelona, Spain, Sep. 2016, pp. 213-215. doi:10.18429/JACoW-MEDSI2016-TUPE22

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Paper Title: Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors
Paper URL: https://jacow.org/medsi2016/papers/TUPE22.pdf
Conference: 9th Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conf. (MEDSI'16)
Paper ID: TUPE22
Location in proceedings: 213-215
Original Author String: M. Toyoda, R. Sunayama, M. Yanagihara [Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, Sendai, Japan]

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