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[n]	J. J. Peshl, S. Popovic, L. Vuskovic, J. Upadhyay, and A-M. Valente-Feliciano, “The Effect of Process Parameters on the Surface Properties of Niobium During Plasma Etching”, in Proc. SRF'17, Lanzhou, China, Jul. 2017, pp. 628-630. doi:10.18429/JACoW-SRF2017-TUPB098

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Paper Title: The Effect of Process Parameters on the Surface Properties of Niobium During Plasma Etching
Paper URL: https://jacow.org/srf2017/papers/TUPB098.pdf
Conference: 18th Int. Conf. RF Superconductivity (SRF'17)
Paper ID: TUPB098
Location in proceedings: 628-630
Original Author String: J.J. Peshl, S. Popovic (S. Popovi?), L. Vuskovic (L. Vu?íkovi?) [ODU, Norfolk, Virginia, USA] J. Upadhyay [LANL, Los Alamos, New Mexico, USA] A-M. Valente-Feliciano [JLab, Newport News, Virginia, USA]

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