[n] E. Syresin et al., “Proposal for an Accelerator Complex for Extreme Ultraviolet Nanolithography Using kW-scale FEL Light Source”, in Proc. RuPAC'10, Protvino, Russia, Sep.-Oct. 2010, paper WEPSB003, pp. 178-180.
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Paper Title: Proposal for an Accelerator Complex for Extreme Ultraviolet Nanolithography Using kW-scale FEL Light Source
Paper URL: https://jacow.org/r10/papers/WEPSB003.pdf
Conference: 22nd Russian Particle Accelerator Conf. (RuPAC'10)
Paper ID: WEPSB003
Location in proceedings: 178-180
Original Author String: E. Syresin, N. Balalykin, U. A. Budagov, I. F. Lensky, A. G. Olshevsky, G. Shirkov, A. P. Sumbaev, G. V. Trubnikov, JINR, Dubna, Moscow Region; M. V. Yurkov, DESY, Hamburg
