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[n]	A. Heuberger, “Lithography Production Techniques for next Generations of Microelectronics”, in Proc. EPAC'92, Berlin, Germany, Mar. 1992, pp. 192-197. 

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Paper Title: Lithography Production Techniques for next Generations of Microelectronics
Conference: 3rd European Particle Accelerator Conf. (EPAC'92)
Paper ID:
Location in proceedings: 192-197
Original Author String: A. Heuberger

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