[n] T. Tomimasu, T. Mikado, T. Noguchi, S. Sugiyama, and T. Yamazaki, “An Electron Undulating Ring for VLSI Lithography”, in Proc. PAC'85, Vancouver, Canada, May 1985, pp. 3403-3406.
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Paper Title: An Electron Undulating Ring for VLSI Lithography
Conference: 11th Particle Accelerator Conf. (PAC'85)
Paper ID:
Location in proceedings: 3403-3406
Original Author String: T. Tomimasu, T. Mikado, T. Noguchi, S. Sugiyama, T. Yamazaki