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[n]	R. Maldonado, “Overview of X-Ray Lithography at IBM Using a Compact Storage Ring”, in Proc. PAC'91, San Francisco, CA, USA, May 1991, pp. 542-547. 

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Paper Title: Overview of X-Ray Lithography at IBM Using a Compact Storage Ring
Conference: 14th Particle Accelerator Conf. (PAC'91)
Paper ID:
Location in proceedings: 542-547
Original Author String: Juan R. Maldonado

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