[n] S. R. Walther, C. M. McKenna, and B. O. Pedersen, “Ion Sources for Commercial Ion Implanter Applications”, in Proc. PAC'91, San Francisco, CA, USA, May 1991, pp. 2088-2093.
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Paper Title: Ion Sources for Commercial Ion Implanter Applications
Conference: 14th Particle Accelerator Conf. (PAC'91)
Paper ID:
Location in proceedings: 2088-2093
Original Author String: S.R. Walther, C.M. McKenna, B.O. Pedersen