[n] H. J. Woo et al., “Application of Hydrogen Ion Beams for SOI Wafer Formation”, in Proc. APAC'04, Gyeongju, Korea, Mar. 2004, paper TUP19008, pp. XX-XX.
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Paper Title: Application of Hydrogen Ion Beams for SOI Wafer Formation
Paper URL: https://jacow.org/a04/papers/TUP19008.pdf
Conference: 3rd Asian Particle Accelerator Conf. (APAC'04)
Paper ID: TUP19008
Location in proceedings:
Original Author String: H.J. Woo, H.W. Choi, G.D. Kim, J.K. Kim, W. Hong, Y.Y. Ji (KIGAM), W.B. Choi (BNP Science), Y.H. Bae (Uiduk Univ.)