JaCoW Logo

Reference Search

Warning
The page numbers could not be added automatically for this paper. You must provide the page numbers from the original proceedings which is located at JACoW.org, and substitute ‘pp. XX-XX’ with the correct page numbers.
* Please report these numbers by clicking on the ‘Fix a problem’ button as an Admin will be able to update this reference for future results.

Reference


For Word

[n]	H. J. Woo et al., “Application of Hydrogen Ion Beams for SOI Wafer Formation”, in Proc. 3rd Asian Particle Accelerator Conf. (APAC'04), Gyeongju, Korea, Mar. 2004, paper TUP19008, pp. XX-XX. 

For LaTeX

For BibTeX

Use Abbreviated Form

Metadata

Paper Title: Application of Hydrogen Ion Beams for SOI Wafer Formation
Paper URL: https://jacow.org/a04/papers/TUP19008.pdf
Conference: 3rd Asian Particle Accelerator Conf. (APAC'04)
Paper ID: TUP19008
Location in proceedings:
Original Author String: H.J. Woo, H.W. Choi, G.D. Kim, J.K. Kim, W. Hong, Y.Y. Ji (KIGAM), W.B. Choi (BNP Science), Y.H. Bae (Uiduk Univ.)

Associated Authors


Back to the list