[n] J. Melngailis, “Ion Sources for Nanofabrication and High Resolution Lithography”, in Proc. PAC'01, Chicago, IL, USA, Jun. 2001, paper MOPB007, pp. 76-80.
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Paper Title: Ion Sources for Nanofabrication and High Resolution Lithography
Paper URL: https://jacow.org/p01/papers/MOPB007.pdf
Conference: 19th Particle Accelerator Conf. (PAC'01)
Paper ID: MOPB007
Location in proceedings: 76-80
Original Author String: J. Melngailis