Reference Search

Reference

For Word

[n]	L. R. Harriott, “SCALPEL: Projection Electron Beam Lithography”, in Proc. PAC'99, New York, NY, USA, Mar. 1999, paper FRBL1, pp. 595-599.

For LaTeX

%\cite{Harriott:PAC99-FRBL1} \bibitem{Harriott:PAC99-FRBL1} L. R. Harriott, \textquotedblleft{SCALPEL: Projection Electron Beam Lithography}\textquotedblright, in \emph{Proc. PAC’99}, New York, NY, USA, Mar. 1999, paper FRBL1, pp. 595--599.

For BibTeX

@inproceedings{harriott:pac99-frbl1, author = {L. R. Harriott}, title = {{SCALPEL: Projection Electron Beam Lithography}}, booktitle = {Proc. PAC'99}, pages = {595--599}, paper = {FRBL1}, venue = {New York, NY, USA, Mar. 1999}, publisher = {JACoW Publishing, Geneva, Switzerland}, url = {https://jacow.org/p99/papers/FRBL1.pdf}, language = {english} }

Use Complete Form

Metadata

Paper Title: SCALPEL: Projection Electron Beam Lithography
Paper URL: https://jacow.org/p99/papers/FRBL1.pdf
Conference: 18th Particle Accelerator Conf. (PAC'99)
Paper ID: FRBL1
Location in proceedings: 595-599
Original Author String: L.R. Harriott, Bell Laboratories-Lucent Technologies, Murray Hill, New Jersey

Associated Authors

L. R. Harriott

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