[n] P. Nenzi et al., “Proton Beam Applications for Silicon Bulk Micromachining”, in Proc. IPAC'15, Richmond, VA, USA, May 2015, pp. 2241-2244. doi:10.18429/JACoW-IPAC2015-TUPWI003
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Paper Title: Proton Beam Applications for Silicon Bulk Micromachining
Paper URL: https://jacow.org/IPAC2015/papers/TUPWI003.pdf
Conference: 6th Int. Particle Accelerator Conf. (IPAC'15)
Paper ID: TUPWI003
Location in proceedings: 2241-2244
Original Author String: P. Nenzi, G. Bazzano, F. Marracino, L. Picardi, C. Ronsivalle, V. Surrenti, M. Vadrucci [ENEA C.R. Frascati, Frascati (Roma), Italy] F. Ambrosini [University of Rome La Sapienza, Rome, Italy] F. Ambrosini [Universit?á di Roma quot;La Sapienzaquot;, SAPIENZA-DIET, Roma, Italy] M. Balucani, A. Klyshko [University of Rome quot;La Sapienzaquot;, Rome, Italy] C. Snels, M. Tucci [ENEA Casaccia, Roma, Italy]