[n] S. B. Leith, X. Jiang, R. Ries, E. Seiler, and M. Vogel, “Deposition Parameter Effects on Niobium Nitride (NbN) Thin Films Deposited Onto Copper Substrates with DC Magnetron Sputtering”, in Proc. SRF'19, Dresden, Germany, Jun.-Jul. 2019, pp. 945-949. doi:10.18429/JACoW-SRF2019-THP043
Use Complete Form
Paper Title: Deposition Parameter Effects on Niobium Nitride (NbN) Thin Films Deposited Onto Copper Substrates with DC Magnetron Sputtering
Paper URL: https://jacow.org/srf2019/papers/THP043.pdf
Conference: 19th Int. Conf. RF Superconductivity (SRF'19)
Paper ID: THP043
Location in proceedings: 945-949
Original Author String: S. B. Leith,X. Jiang,R. Ries,E. Seiler,M. Vogel