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Author: J. Wrench


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Reference
P. Pizzol, P. Chalker, J. W. Roberts, J. Wrench, O. B. Malyshev, and R. Valizadeh, “Atomic Layer Deposition of Niobium Nitride from Different Precursors”, in Proc. 8th Int. Particle Accelerator Conf. (IPAC'17), Copenhagen, Denmark, May 2017, pp. 1094-1097.


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