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[n]	P. Pizzol, P. Chalker, J. W. Roberts, J. Wrench, O. B. Malyshev, and R. Valizadeh, “Atomic Layer Deposition of Niobium Nitride from Different Precursors”, in Proc. IPAC'17, Copenhagen, Denmark, May 2017, pp. 1094-1097. doi:10.18429/JACoW-IPAC2017-MOPVA100

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Paper Title: Atomic Layer Deposition of Niobium Nitride from Different Precursors
Paper URL: https://jacow.org/ipac2017/papers/MOPVA100.pdf
Conference: 8th Int. Particle Accelerator Conf. (IPAC'17)
Paper ID: MOPVA100
Location in proceedings: 1094-1097
Original Author String: P. Pizzol, P. Chalker, J.W. Roberts, J. Wrench [The University of Liverpool, Liverpool, United Kingdom] O.B. Malyshev, R. Valizadeh [STFC/DL/ASTeC, Daresbury, Warrington, Cheshire, United Kingdom]

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