|
P. Pizzol, P. Chalker, J. W. Roberts, J. Wrench, O. B. Malyshev, and R. Valizadeh, “Atomic Layer Deposition of Niobium Nitride from Different Precursors”, in Proc. 8th Int. Particle Accelerator Conf. (IPAC'17), Copenhagen, Denmark, May 2017, pp. 1094-1097. |
