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Author: M. Ida
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M. Ida, Y. Kohno, S. Mandai, M. Ohishi, M. Takahashi, and H. Ukikusa, “Development of Compact Synchrotron Light Source for X-Ray Lithography”, in
Proc. 3rd European Particle Accelerator Conf. (EPAC'92)
, Berlin, Germany, Mar. 1992, pp. 200-203.
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