[n] M. Ida, Y. Kohno, S. Mandai, M. Ohishi, M. Takahashi, and H. Ukikusa, “Development of Compact Synchrotron Light Source for X-Ray Lithography”, in Proc. EPAC'92, Berlin, Germany, Mar. 1992, pp. 200-203.
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Paper Title: Development of Compact Synchrotron Light Source for X-Ray Lithography
Conference: 3rd European Particle Accelerator Conf. (EPAC'92)
Paper ID:
Location in proceedings: 200-203
Original Author String: M. Ida, Y. Kohno, S. Mandai, M. Ohishi, M. Takahashi, H. Ukikusa