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Author: W. I. Howes
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G. Gaitan
et al.
, “Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities”, in
Proc. 21th Int. Conf. RF Superconductivity (SRF'23)
, Grand Rapids, MI, USA, Jun. 2023, paper MOPMB015, pp. 100-103.
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