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[n]	G. Gaitan et al., “Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities”, in Proc. SRF'23, Grand Rapids, MI, USA, Jun. 2023, paper MOPMB015, pp. 100-103. 

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Paper Title: Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities
Conference: 21th Int. Conf. RF Superconductivity (SRF'23)
Paper ID: MOPMB015
Location in proceedings: 100-103
Original Author String: G. Gaitan,A. T. Holic,W. I. Howes,G. Kulina,M. Liepe,P. Quigley,J. Sears,Z. Sun,B. W. Wendland

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