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[n]	J. Tagg, E. Bez, M. Himmerlich, and A. K. Reascos Portilla, “A Reliable Monitoring and Control System for Vacuum Surface Treatments”, in Proc. ICALEPCS'21, Shanghai, China, Oct. 2021, pp. 492-496. doi:10.18429/JACoW-ICALEPCS2021-TUPV039

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