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[n]	G. Gaitan et al., “Development of a System for Coating SRF Cavities Using Remote Plasma CVD”, in Proc. SRF'21, East Lansing, MI, USA, Jun.-Jul. 2021, pp. 129. doi:10.18429/JACoW-SRF2021-SUPTEV007

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Paper Title: Development of a System for Coating SRF Cavities Using Remote Plasma CVD
Paper URL: https://jacow.org/srf2021/papers/SUPTEV007.pdf
Conference: 20th Int. Conf. RF Superconductivity (SRF'21)
Paper ID: SUPTEV007
Location in proceedings: 129
Original Author String: G. Gaitan, P. Bishop, A.T. Holic, G. Kulina, M. Liepe, J. Sears, Z. Sun

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