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[n]	J. Upadhyay, M. Nikoli, S. Popovic, L. Vuskovic, H. L. Phillips, and A-M. Valente-Feliciano, “Etching of Niobium Sample Placed on Superconducting Radio Frequency Cavity Surface in Ar/CL2 Plasma”, in Proc. IPAC'11, San Sebastian, Spain, Sep. 2011, paper MOPC122, pp. 367-369. 

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