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[n]	S. Kato and H. Hayano, “Plasma-enhanced ALD System for SRF Cavity”, in Proc. SRF'17, Lanzhou, China, Jul. 2017, pp. 870-872. doi:10.18429/JACoW-SRF2017-THPB055

For LaTeX

%\cite{Kato:SRF17-THPB055} \bibitem{Kato:SRF17-THPB055} S. Kato and H. Hayano, \textquotedblleft{Plasma-enhanced ALD System for SRF Cavity}\textquotedblright, in \emph{Proc. SRF’17}, Lanzhou, China, Jul. 2017, pp. 870--872. \url{doi:10.18429/JACoW-SRF2017-THPB055}

For BibTeX

@inproceedings{kato:srf17-thpb055, author = {S. Kato and H. Hayano}, title = {{Plasma-enhanced ALD System for SRF Cavity}}, booktitle = {Proc. SRF'17}, pages = {870--872}, paper = {THPB055}, venue = {Lanzhou, China, Jul. 2017}, publisher = {JACoW Publishing, Geneva, Switzerland}, doi = {10.18429/JACoW-SRF2017-THPB055}, url = {https://jacow.org/srf2017/papers/THPB055.pdf}, language = {english} }

References

• S. Kato and H. Hayano, “Plasma-enhanced ALD System for SRF Cavity”, in Proc. 18th Int. Conf. RF Superconductivity (SRF'17), Lanzhou, China, Jul. 2017, pp. 870-872.