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For Word

[n]	B. J. Masters, “Radiotracer Measurements of Sputtered Contamination Incurred During ION Implantation Processing”, in Proc. PAC'73, San Francisco, CA, USA, Mar. 1973, pp. 1032-1035. 

For LaTeX

%\cite{Masters:PAC73} \bibitem{Masters:PAC73} B. J. Masters, \textquotedblleft{Radiotracer Measurements of Sputtered Contamination Incurred During ION Implantation Processing}\textquotedblright, in \emph{Proc. PAC’73}, San Francisco, CA, USA, Mar. 1973, pp. 1032--1035.

For BibTeX

@inproceedings{masters:pac73, author = {B. J. Masters}, title = {{Radiotracer Measurements of Sputtered Contamination Incurred During ION Implantation Processing}}, booktitle = {Proc. PAC'73}, pages = {1032--1035}, paper = {}, venue = {San Francisco, CA, USA}, series = {Particle Accelerator Conference}, number = {5}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {6}, year = {1973}, language = {english} }

References

• B. J. Masters, “Radiotracer Measurements of Sputtered Contamination Incurred During ION Implantation Processing”, in Proc. 5th Particle Accelerator Conf. (PAC'73), San Francisco, CA, USA, Mar. 1973, pp. 1032-1035.