[n] S. B. Leith, X. Jiang, R. Ries, E. Seiler, and M. Vogel, “Deposition Parameter Effects on Niobium Nitride (NbN) Thin Films Deposited Onto Copper Substrates with DC Magnetron Sputtering”, in Proc. SRF'19, Dresden, Germany, Jun.-Jul. 2019, pp. 945-949. doi:10.18429/JACoW-SRF2019-THP043
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