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[n]	G. K. Deyu, R. H. Blick, I. González Díaz-Palacio, W. Hillert, M. Wenskat, and R. Zierold, “Successful Al₂O₃ Coating of Superconducting Niobium Cavities by Thermal ALD”, presented at the 21th Int. Conf. RF Superconductivity (SRF'23), Grand Rapids, MI, USA, Jun. 2023, paper MOPMB016, unpublished. 

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Paper Title: Successful Al₂O₃ Coating of Superconducting Niobium Cavities by Thermal ALD
Conference: 21th Int. Conf. RF Superconductivity (SRF'23)
Paper ID: MOPMB016
Original Author String: G. K. Deyu,R. H. Blick,I. González Díaz-Palacio,W. Hillert,M. Wenskat,R. Zierold

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