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[n]	G. K. Deyu, R. H. Blick, I. González Díaz-Palacio, W. Hillert, M. Wenskat, and R. Zierold, “Successful Al₂O₃ Coating of Superconducting Niobium Cavities by Thermal ALD”, in Proc. SRF'23, Grand Rapids, MI, USA, Jun. 2023, pp. 104-108. doi:10.18429/JACoW-SRF2023-MOPMB016

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Paper Title: Successful Al₂O₃ Coating of Superconducting Niobium Cavities by Thermal ALD
Conference: 21th Int. Conf. RF Superconductivity (SRF'23)
Paper ID: MOPMB016
Location in proceedings: 104-108
Original Author String: G. K. Deyu,R. H. Blick,I. González Díaz-Palacio,W. Hillert,M. Wenskat,R. Zierold

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