[n] R. Watanabe, T. Honda, X. Jin, Y. Tanimoto, and T. Uchiyama, “Sputtering characteristics of a compact NEG-coating device and performance evaluation of the TiZrV thin films”, in Proc. IPAC'25, Taipei, Taiwan, Jun. 2025, pp. 2517-2519. doi:10.18429/JACoW-IPAC2025-THPB008
Use Complete Form
Paper Title: Sputtering characteristics of a compact NEG-coating device and performance evaluation of the TiZrV thin films
Conference: 16th Int. Particle Accelerator Conf. (IPAC'25)
Paper ID: THPB008
Location in proceedings: 2517-2519
Original Author String: R. Watanabe, T. Honda, X. Jin, Y. Tanimoto, T. Uchiyama